Material For Forming Organic Film, Patterning Process, And Organic Film Compound
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsDaisuke KORI, Yasuyuki YAMAMOTO
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Abstract
The present invention is a material for forming an organic film, containing: an organic film compound represented by the following general formula (1); and an organic solvent. This provides: an organic film compound which allows the formation of an organic film having not only excellent heat resistance and properties of filling and planarizing a pattern formed on a substrate, but also favorable film-formability and adhesiveness to a substrate; a material for forming an organic film containing the compound; and a patterning process using the material.
Claims17
A material for forming an organic film, comprising:
- an organic film compound represented by the following general formula (1);
- and an organic solvent,
- wherein W1 represents an organic group having a valency of “n1” and containing an aromatic ring, each L represents a substituent on the aromatic ring and is L1, L2, or both, represented by the following general formulae (2), and when a total number of the substituents L on the aromatic ring is “n1”, a number of L1 is “x”, and a number of L2 is “y”, “n1”, “x”, and “y” satisfy relationships x+y=n1, 2≤n1≤8, 0≤y≤8, and 0≤x≤8,
- wherein “n2” represents an integer of 1 to 3, R1 represents one of the following formulae (3), and R2 represents one of the following general formulae (4),
- wherein R3 represents one of the following formulae (5), “n3” represents 0 or 1, and “n4” represents 1 or 2.
An organic film compound represented by the following general formula (1),
- wherein W1 represents an organic group having a valency of “n1” and containing an aromatic ring, each L represents a substituent on the aromatic ring and is L1, L2, or both, represented by the following general formulae (2), and when a total number of the substituents L on the aromatic ring is “n1”, a number of L1 is “x”, and a number of L2 is “y”, “n1”, “x”, and “y” satisfy relationships x+y=n1, 2≤n1≤8, 0≤y≤8, and 0≤x≤8,
- wherein “n2” represents an integer of 1 to 3, R1 represents one of the following formulae (3), and R2 represents one of the following general formulae (4),
- wherein R3 represents one of the following formulae (5), “n3” represents 0 or 1, and “n4” represents 1 or 2.
Dependencies are inferred from the claim text.