Temperature adjusting system, controller, electronic device handling apparatus, tester, and electronic device testing apparatus
AssigneeAdvantest Corporation
InventorYuya Yamada
Life of this patent
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Abstract
A temperature adjusting system includes a temperature adjuster that adjusts a temperature of a device under test (DUT) and a first acquirer that acquires a first digital signal and outputs a second digital signal. The first digital signal is output from a first temperature detecting circuit in the DUT and indicates an internal temperature of the DUT. The temperature adjusting system includes a controller that controls the temperature adjuster using the second digital signal.
Claims22
A temperature adjusting system comprising:
- a temperature adjuster that adjusts a temperature of a device under test (DUT);
- a first acquirer that acquires a first digital signal and outputs a second digital signal, wherein the first digital signal is output from a first temperature detecting circuit in the DUT and indicates an internal temperature of the DUT;
- and
- a controller that controls the temperature adjuster using the second digital signal.
A temperature adjusting system comprising:
- a temperature adjuster that adjusts a temperature of a device under test (DUT);
- a first acquirer that acquires an internal temperature of the DUT and outputs a first signal;
- a second acquirer that acquires a current temperature of the DUT and outputs a second signal;
- and
- a controller that controls the temperature adjuster using the first signal and the second signal.
A controller that controls a temperature adjuster that adjusts a temperature of a device under test (DUT), wherein
- a first digital signal is output from a temperature detecting circuit in the DUT and indicates an internal temperature of the DUT,
- a second digital signal output from an acquirer that acquires the first digital signal, and
- the controller controls the temperature adjuster using the second digital signal.
A tester that tests either a device under test (DUT) electrically connected to a socket or the DUT held in a carrier electrically connected to the socket, the tester comprising:
- an acquirer that acquires a first digital signal and outputs a second digital signal, wherein
- the first digital signal is output from a temperature detecting circuit in the DUT and indicating an internal temperature of the DUT.
Dependencies are inferred from the claim text.