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US 2024/0402214 A1Published application
Physical quantity sensor, composite sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorTeruo TAKIZAWA
Life of this patent
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Abstract
A gyro sensor includes: a spring having an inner span beam connected to an outer span beam via a turnaround beam; and a fixed driver that laterally faces the outer beam. A first beam is provided to the structure side of the outer beam so as to face the outer beam. T1 is a width of a space between the outer beam and the structure, T2 is a width of a space between the inner and outer beams, and T2<T1.
Claims20
A physical quantity sensor comprising:
- a substrate;
- a structure arranged to overlap the substrate in a plan view;
- and
- an elastic part arranged to overlap the substrate in the plan view,
- wherein the elastic part comprises:
- an inner beam;
- an outer beam arranged between the inner beam and the structure and parallel to the inner beam;
- a first beam arranged between the outer beam and the structure and parallel to the outer beam;
- and
- a connecting part connected to the outer beam and the first beam,
- wherein the first beam includes a pair of free ends,
- a distance between the inner beam and the outer beam is T2,
- a distance between the outer beam and the first beam is T3, and
- 0.8<T3/T2<3.0.
11 more elements
Dependencies are inferred from the claim text.