Back to results
US 2024/0402128 A1Published application
Qcm sensor
AssigneeInficon GmbH
InventorsJoel A. Furco, Russ Bench
Life of this patent
Estimating the term…
Abstract
A quartz crystal microbalance (QCM) sensor, comprises a sensor housing and a crystal component supported within the sensor housing. The crystal component includes a quartz crystal substrate and a gasket seal disposed about the periphery of the quartz crystal substrate configured to prevent ingress of fluids into the sensor housing.
Claims11
A quartz crystal microbalance (QCM) sensor, which comprises:
- a sensor housing;
- and
- a crystal component supported within the sensor housing, the crystal component including a quartz crystal substrate and a gasket seal disposed about the periphery of the quartz crystal substrate configured to prevent ingress of fluids into the sensor housing.
Dependencies are inferred from the claim text.