Methods for three-dimensional tomography of elongated samples
AssigneeFEI Company
InventorsErik Michiel Franken, Trond K. Varslot, Bart Jozef Janssen
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AssigneeFEI Company
InventorsErik Michiel Franken, Trond K. Varslot, Bart Jozef Janssen
Estimating the term…
A method of three-dimensional (3D) tomography comprising: providing a sample comprising an elongate section, the elongation of which defines an elongation axis having an axis length; acquiring a plurality of two-dimensional (2D) composite images of the elongate section along its axis length, each 2D composite image being generated from a respective series of image frames and comprising a projection of the elongate section that is parallel to the elongation axis, wherein each 2D composite image is acquired at a different respective angle of rotation of the sample, relative to an initial orientation of the sample, about a rotation axis that is substantially coincident with the elongation axis; and combining the plurality of projection images to obtain a 3D tomographic representation of the elongate section of the sample.
A method of three-dimensional (3D) tomography comprising:
(canceled)
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