X-ray analyzer
AssigneeShimadzu Corporation
InventorTetsuya YONEDA
Life of this patent
Estimating the term…
Abstract
An X-ray analyzer includes an analyzing crystal configured to spectrally disperse characteristic X-rays for each wavelength, the characteristic X-rays being generated by a sample irradiated with the excitation ray, and a plurality of detection elements arranged to each detect intensity of a characteristic X-ray for each wavelength, the characteristic X-ray being spectrally dispersed by the analyzing crystal. An angle between a direction of the characteristic X-ray spectrally dispersed at a middle point of an effective surface of the analyzing crystal and an array direction of the plurality of detection elements is less than 80 degrees or 100 degrees or more.
Claims6
An X-ray analyzer comprising:
- an excitation source configured to irradiate a sample with an excitation ray;
- an analyzing crystal configured to spectrally disperse characteristic X-rays for each wavelength, the characteristic X-rays being generated by the sample irradiated with the excitation ray;
- and
- a plurality of detection elements arranged to each detect intensity of a characteristic X-ray for each wavelength, the characteristic X-ray being spectrally dispersed by the analyzing crystal,
- wherein the characteristic X-ray spectrally dispersed at a middle point of an effective surface of the analyzing crystal reaches a middle point of a detection surface of the plurality of detection elements, and
- wherein an angle between a direction of the characteristic X-ray spectrally dispersed at the middle point of an effective surface of the analyzing crystal and an array direction of the plurality of detection elements is less than 80 degrees or 100 degrees or more.
An X-ray analyzer comprising:
- an excitation source configured to irradiate a sample with an excitation ray;
- an analyzing crystal configured to spectrally disperse characteristic X-rays for each wavelength, the characteristic X-rays being generated by the sample irradiated with the excitation ray;
- a plurality of detection elements arranged to each detect intensity of a characteristic X-ray for each wavelength, the characteristic X-ray being spectrally dispersed by the analyzing crystal, wherein the characteristic X-ray spectrally dispersed at a middle point of an effective surface of the analyzing crystal reaches a middle point of a detection surface of the plurality of detection elements;
- a drive unit configured to move the plurality of detection elements to change the angle between a direction of a characteristic X-ray spectrally dispersed at the middle point of an effective surface of the analyzing crystal and an array direction of the plurality of detection elements;
- and
- a controller configured to set a first mode and a second mode,
- wherein the drive unit is configured to
- move the plurality of detection elements such that the angle belongs to a range of 80 degrees or more and less than 100 degrees in a case where the first mode is set, and
- move the plurality of detection elements such that the angle belongs to a range of less than 80 degrees and 100 degrees or more in a case where the second mode is set.
Dependencies are inferred from the claim text.