Process for producing a single crystal from silicon
AssigneeSiltronic AG
InventorsWalter HAECKL, Gundars RATNIEKS, Andreas SATTLER, Maksims SUROVOVS, Janis VIRBULIS
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AssigneeSiltronic AG
InventorsWalter HAECKL, Gundars RATNIEKS, Andreas SATTLER, Maksims SUROVOVS, Janis VIRBULIS
Estimating the term…
A process produces a single crystal of silicon. The process includes: installing a feed rod in a float-zone apparatus, having a diameter between 230-270 mm; installing a first hollow cylinder having an internal diameter larger, by 30-50 mm, than the feed rod's diameter; installing a second hollow cylinder having an internal diameter larger, by not 20-60 mm, than a crystal target diameter that is 290-310 mm; and pulling the single crystal of silicon. A pulling speed is 1.3-1.5 mm/min. A vertical distance of the bottom edge of the first hollow cylinder from the outer melting edge is smaller than 2 mm. The top edge of the second cylinder protrudes 1-10 mm over the crystallizing edge. A length of the single crystal is removed to form an ingot piece having a length 15-50 cm.
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