Coating device, meniscus head, and coating method
AssigneesKabushiki Kaisha Toshiba, Toshiba Energy Systems & Solutions Corporation
InventorsNaomi SHIDA, Katsuyuki Naito, Yutaka Saita
Life of this patent
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Abstract
According to an embodiment, provided are a coating device, a meniscus head, and a coating method capable of obtaining a uniform coating film with a large area. A coating device according to an embodiment forms a coating film by a meniscus method, the coating device comprising: a member that conveys a base material; a coating bar; a slot die that supplies a coating liquid to a surface of the coating bar; and a member that supplies the coating liquid to the slot die, in which each of the members is disposed such that the coating liquid supplied from the slot die is supplied to a space between the coating bar and the base material via the surface of the coating bar to form a meniscus.
Claims17
A coating device configured to supply a coating liquid to a surface of a base material and to form a coating film by a meniscus method, the coating device comprising:
- a member that conveys the base material;
- a coating bar;
- a slot die that supplies the coating liquid to a surface of the coating bar;
- and
- a coating liquid supply member that supplies the coating liquid to the slot die,
- wherein each of the members is disposed such that the coating liquid supplied from the slot die is supplied to a space between the coating bar and the base material via the surface of the coating bar to form a meniscus.
A meniscus head disposed apart from a base material and supplying a coating liquid to a surface of the base material to form a coating film, the meniscus head comprising:
- a coating bar;
- a slot die that supplies the coating liquid to a surface of the coating bar;
- and
- a fixing member that connects and fixes the coating bar to the slot die,
- wherein the coating liquid discharged from the slot die is supplied to a gap between the coating bar and the base material via the surface of the coating bar to form a meniscus and to form the coating film.
A coating method of forming a coating film on a surface of a base material by supplying a coating liquid to a space between a coating bar and the base material and forming a meniscus, the coating method comprising:
- (S31) a step of supplying the coating liquid to a slot die and removing air;
- (S32) a step of controlling an interval between the coating bar and the slot die;
- (S33) a step of controlling an interval between the coating bar and the base material;
- (S34) a step of supplying the coating liquid from the slot die to a space between the coating bar and the base material via a surface of the coating bar to form the meniscus;
- and
- (S35) a step of conveying the base material to form the coating film.
Dependencies are inferred from the claim text.