Substrate processing apparatus and method of adjusting substrate transfer position

A transfer position adjusting method to be executed in a substrate processing apparatus including:

• a process mechanism the process mechanism including a processing container that accommodates therein a substrate;
• a transfer device including a substrate holder that holds the substrate and is freely movable to transfer the substrate to and from the process mechanism;
• and
• a detector configured to detect a position of the substrate held by the substrate holder;
• a first supporting member that horizontally supports the substrate in the processing container;
• and
• a second supporting member that horizontally supports the substrate at an outside of the processing container, the method comprising:
• correcting a position of the substrate holder based on a displacement amount between a predetermined reference position and a position of the substrate detected by the detector after transferring to the second supporting member;
• and
• controlling the transfer device to transfer the substrate from the substrate holder to the first supporting member based on the corrected position of the substrate holder when the substrate is transferred to the process mechanism.