Semiconductor test result analysis device, semiconductor test result analysis method, and recording medium
AssigneeAdvantest Corporation
InventorsKosuke IKEDA, Hajime SUGIMURA
Life of this patent
Estimating the term…
Abstract
A condition data acquirer acquires first data (condition data) of a plurality of items related to a test process of a plurality of semiconductor chips. A test result acquirer acquires second data (test result data) indicating test results of the plurality of semiconductor chips in the test process. A decision tree generator generates a decision tree with each item of the condition data as a feature amount and the test result data as a target value. An analysis result outputter outputs, as an item having a large influence on the test results, information of a feature amount having a relatively high importance in the decision tree.
Claims7
A semiconductor test result analysis device comprising:
- a first acquirer structured to acquire first data of a plurality of items related to a test process of a plurality of semiconductor chips;
- a second acquirer structured to acquire second data indicating test results of the plurality of semiconductor chips in the test process;
- a decision tree generator structured to generate a decision tree with each item of the first data as a feature amount and the second data as a target value;
- and
- an outputter structured to output, as an item having a large influence on the test results, information of a feature amount having a relatively high importance in the decision tree.
A semiconductor test result analysis method comprising:
- a step of causing a computer to acquire first data of a plurality of items related to a test process of a plurality of semiconductor chips;
- a step of causing the computer to acquire second data indicating test results of the plurality of semiconductor chips in the test process;
- a step of causing the computer to generate a decision tree with each item of the first data as a feature amount and the second data as a target value;
- and
- a step of causing the computer to output, as an item having a large influence on the test results, information of a feature amount having a relatively high importance in the decision tree.
A non-transitory computer-readable recording medium encoded with a computer program for causing a computer to realize:
- a function of acquiring first data of a plurality of items related to a test process of a plurality of semiconductor chips;
- a function of acquiring second data indicating test results of the plurality of semiconductor chips in the test process;
- a function of generating a decision tree with each item of the first data as a feature amount and the second data as a target value;
- and
- a function of outputting, as an item having a large influence on the test results, information of a feature amount having a relatively high importance in the decision tree.
Dependencies are inferred from the claim text.