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US 2024/0393373 A1Published application
Rf measurement from a transmission line sensor
AssigneeApplied Materials, Inc.
InventorsDavid Coumou, Xiaopu Li, Michelle SanPedro
Life of this patent
Estimating the term…
Abstract
Embodiments disclosed herein include a sensor. In an embodiment, the sensor comprises a board, wherein an aperture is formed through the board, a current loop winding through the board around the aperture, and a voltage ring around the aperture and within an inner perimeter of the current loop, wherein the voltage ring comprises an interior ring, an insulator ring around the interior ring, and an exterior ring around the insulator ring.
Claims14
A sensor, comprising:
- a board, wherein an aperture is formed through the board;
- a current loop winding through the board around the aperture;
- a voltage ring around the aperture and within an inner perimeter of the current loop;
- a guard ring around the current loop;
- and
- one or more baluns in corresponding cutouts in the guard ring.
3 more elements
A sensor, comprising:
- a board, wherein an aperture is provided through the board;
- a current loop around the aperture, wherein the current loop comprises:
- an inner set of vias;
- an outer set of vias;
- and
- a plurality of conductive traces, wherein each conductive trace couples a via of the inner set of vias to a via of the outer set of vias, and wherein the plurality of conductive traces alternate from being on a top surface of the board and on a bottom surface of the board;
- a voltage ring within an inner perimeter of the current loop;
- a guard ring around the current loop;
- and
- one or more baluns in corresponding cutouts in the guard ring.
7 more elements
A processing tool, comprising:
- a power supply;
- an impedance matching network coupled to the power supply;
- a cathode, wherein the power supply is configured to supply power through the impedance matching network to the cathode;
- a processing module, wherein the processing module is communicatively coupled to the power supply and the impedance matching network;
- a first sensor provided upstream of the impedance matching network and a second sensor provided downstream of the impedance matching network, wherein the first sensor and the second sensor each comprise:
- a board, wherein an aperture is formed through the board;
- a current loop winding through the board around the aperture;
- a voltage ring around the aperture and within an inner perimeter of the current loop;
- a guard ring around the current loop;
- and
- one or more baluns in corresponding cutouts in the guard ring.
8 more elements
Dependencies are inferred from the claim text.