Method of performing inter-site backup processing of wafer lots
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMei-Hsuan LIN, Rong Syuan FAN, Jen-Yuan Chang
Life of this patent
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Abstract
A method includes: receiving an auxiliary routing request from a manufacturing execution system (MES) apparatus of a first site by an inter-site backup management apparatus; selecting an auxiliary route to a second site based on the auxiliary routing request and a statistical model by the inter-site backup management apparatus; including the auxiliary route in a route associated with a wafer lot by the MES apparatus; and performing a semiconductor processing operation on a wafer of the wafer lot according to the route.
Claims20
A method, comprising:
- generating a statistical model associated with an inter-site backup process;
- assigning an auxiliary route to a first wafer lot of a first site by an inter-site backup management apparatus according to the statistical model and conditions of the first site and a second site;
- generating historical routing data by processing the first wafer lot according to the auxiliary route;
- and
- updating the statistical model based on the historical routing data by the inter-site backup management apparatus.
An inter-site backup management method, comprising:
- generating a statistical model associated with an inter-site backup process, wherein the statistical model is trained using historical routing data and historical conditions data;
- assigning an auxiliary route to a first wafer lot of a first site by an inter-site backup management apparatus according to the statistical model and real-time conditions of the first site and a second site;
- generating historical routing data by processing the first wafer lot according to the auxiliary route;
- updating the statistical model based on the historical routing data and an error value, wherein the error value is generated by comparing a predicted cycle time associated with the auxiliary route with an actual cycle time associated with the auxiliary route;
- selecting subsequent auxiliary routes for wafer lots based on the updated statistical model;
- providing real-time updates to the inter-site backup management apparatus from semiconductor processing tools regarding their loading status;
- communicating the selected auxiliary routes and their impact on tool loading to manufacturing execution systems (MES) at the first and second sites.
A method, comprising:
- generating a statistical model associated with an inter-site backup process;
- assigning an auxiliary route to a first wafer lot of a first site by an inter-site backup management apparatus according to the statistical model and conditions of the first site and a second site;
- generating historical routing data by processing the first wafer lot according to the auxiliary route;
- generating an error value by comparing a predicted cycle time associated with the auxiliary route with an actual cycle time associated with the auxiliary route;
- adjusting the error value based on a weighting factor associated with the priority level of the first wafer lot;
- and
- updating the statistical model based on the historical routing data by the inter-site backup management apparatus and based on the error value.
Dependencies are inferred from the claim text.