Rotation rate sensor with a substrate having a main extension plane and with at least one mass oscillator

Abstract

A rotation rate sensor. The rotation rate sensor includes a substrate having a main extension plane, and includes at least one mass oscillator. The mass oscillator is connected to a drive structure via one or more spring elements and can be excited to oscillate in an excitation direction running in parallel with the main extension plane. The rotation rate sensor has at least one detection element connected to the mass oscillator and a first and second anchor element connected fixedly to the substrate. The detection element is connected to the first anchor element via a first spring element and is connected to the second anchor element via a second spring element. The detection element can be deflected along a detection direction running in parallel with the main extension plane and perpendicularly to the excitation direction. The first and the second spring element comprise a parallelogram spring element.

Dependencies are inferred from the claim text.