Position measurement device, position measurement system, and measurement device
AssigneeNikon Corporation
InventorShinji SATO
Life of this patent
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AssigneeNikon Corporation
InventorShinji SATO
Estimating the term…
A position measurement device includes a movement device capable of movement, a position measurement unit including an irradiation unit configured to irradiate measurement light to a reflective element arranged on a movable unit of a robot, a light reception unit configured to receive reflected light from the reflective element, a position information acquisition unit configured to acquire position information of the reflective element, and a movement unit configured to change an irradiation direction of the measurement light, an imaging unit, and a transmission unit configured to transmit the position information acquired by the position information acquisition unit or adjustment information of the robot based on the position information to a control system of the robot. The movement device moves at least one of the irradiation unit, the light reception unit, the movement unit, and the imaging unit. The movement unit is controlled so that one or both of at least a part of the robot and the reflective element are imaged using the imaging unit and the measurement light is irradiated to the reflective element on the basis of an imaging result of the imaging unit.
A position measurement device comprising:
A position measurement device comprising:
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A position measurement method with a position measurement device,
Dependencies are inferred from the claim text.