Position measurement device and position measurement method
AssigneeNikon Corporation
InventorShinji SATO
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AssigneeNikon Corporation
InventorShinji SATO
Estimating the term…
A position measurement device includes a position measurement unit configured to irradiate measurement light to a reflective element, receive reflected light reflected by the reflective element, and acquire position information of the reflective element in a three-dimensional space and a reference position measurement unit configured to irradiate reference measurement light to at least one reference reflective element, receive reference reflected light reflected by the reference reflective element, and acquire position information of the reference reflective element in a three-dimensional space. The position information of the reflective element acquired by the position measurement unit is corrected using the position information of the reference reflective element measured by the reference position measurement unit.
A position measurement device comprising:
(canceled)
-39. (canceled)
A position measurement method comprising:
-53. (canceled)
A position measurement system comprising:
Dependencies are inferred from the claim text.