Film forming method and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsYUTO ITO, TOSHIKI ITO, ISAO KAWATA
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AssigneeCanon Kabushiki Kaisha
InventorsYUTO ITO, TOSHIKI ITO, ISAO KAWATA
Estimating the term…
A film forming method includes an arranging step of arranging a curable composition on a base material, a contact step of bringing the curable composition into contact with a film forming region of a mold after the arranging step, a curing step of curing the curable composition after the contact step, and a separation step of separating the curable composition and the mold after the curing step, wherein in the contact step, a gas that fills a space between the base material and the mold exists, a solubility coefficient of the gas to the curable composition is not less than 0.5 kg/m3·atm and not more than 10 kg/m3·atm, and an average liquid film thickness that is a value obtained by dividing a volume of the curable composition by an area of the film forming region is not less than 70 nm.
A film forming method comprising:
A film forming method comprising:
Dependencies are inferred from the claim text.