Acoustic foreign matter removal device

An acoustic foreign matter removal device for removing foreign matter adhering to a surface of a target object, the acoustic foreign matter removal device comprising:

• a stage that holds the target object on a holding surface;
• an acoustic head arranged to be separated apart from the stage;
• and
• a movement mechanism that relatively moves the acoustic head with respect to the stage,
• wherein the acoustic head has a plurality of ultrasonic generators having directivity, and a casing to which the plurality of ultrasonic generators are mounted such that a plurality of ultrasonic waves generated from the plurality of ultrasonic generators are concentrated
• the plurality of ultrasonic waves generated from the plurality of ultrasonic generators are concentrated in a gap between the casing and the holding surface of the stage to form a low pressure region having a pressure lower than atmospheric pressure in the gap;
• and the foreign matter adhering to the surface of the target object is sucked into the low pressure region to remove the foreign matter from the surface, and
• the movement mechanism relatively moves the acoustic head to a foreign matter disposal unit arranged to be separated apart from the target object.