Slot die coating apparatus and the coating method thereof
AssigneePrologium Technology Co., Ltd.
InventorsChia-Ming LIN, Szu-Nan YANG, Chia-Chi HUANG
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Abstract
The invention provides a slot die coating apparatus and the coating method thereof. The flow path is divided into a first flow path and a second flow path by the shim group. The first flow path is utilized to coat from the middle portion of the coating nozzle and the second flow path is utilized to coat from the two sides of the coating nozzle. The height for coating of the slot die coating apparatus is adjustable, and the slurry may be exposed from the first flow path or the second flow path. Therefore, hitting the obstacle of the substrate can be avoided during coating to achieve the optimized coating.
Claims10
A slot die coating apparatus, adapted for coating on a substrate, comprising:
- an upper mold, including an upper inlet and a first slurry storage slot connected to the upper inlet;
- a lower mold, including a lower inlet and a second slurry storage slot connected to the lower inlet;
- and
- a shim group, sandwiched between the upper mold and the lower mold, comprising:
- a central shim plate;
- an upper shim plate, having at least one notch and sandwiched between the central shim plate and the upper mold, wherein the notch is connected to the first slurry storage slot to dispense a slurry from the upper inlet for coating;
- and
- a lower shim plate, sandwiched between another side of the central shim plate and the lower mold and having at least one first flow path slot and at least one second flow path slot to dispense a slurry from the lower inlet for coating, which are connected to the second slurry storage slot, wherein the first flow pate slot and the second flow path slot are located at two ends of the notch respectively and are partially overlapped with the notch.
A slot die coating apparatus, adapted for coating on a substrate, comprising:
- a die body, including a flow path and a coating nozzle, wherein the die body receives a slurry from the flow path and dispenses the slurry from the coating nozzle;
- and
- a shim group, disposed in the die body, comprising:
- a central shim plate, separating completely the flow path into a first flow path and a second flow path;
- an upper shim plate, having a notch in a middle portion and disposed on one side of the central shim plate, wherein the notch is connected to the first flow path to dispense the slurry from a middle portion of the coating nozzle for coating;
- and
- a lower shim plate, disposed on another side of the central shim plate, shielding a middle portion of the second flow path and having a first flow path slot and a second flow path slot on both sides, wherein the first flow path slot and the second flow path slot are connected to the second flow path to dispense the slurry from both sides of the coating nozzle for coating.
Dependencies are inferred from the claim text.