Semiconductor memory devices and methods of manufacturing thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMeng-Han Lin, Chia-En Huang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMeng-Han Lin, Chia-En Huang
Estimating the term…
A method for fabricating memory devices includes: forming a gate dielectric layer; forming a first semiconductor film on a first side of the gate dielectric layer; forming a first metal structure on a second side of the gate dielectric layer opposite to the first side, the first metal structure extending along a first lateral direction; forming a first conductive structure on the second side over the first semiconductor film, the first conductive structure extending along the first lateral direction to traverse across the first semiconductor film, and further extending along a vertical direction; forming a second conductive structure on the second side over the first semiconductor film, wherein the second conductive structure extends along the vertical direction; and forming a third conductive structure on the second side over the first semiconductor film, the third conductive structure extending along the vertical direction.
A method for fabricating memory devices, comprising:
A memory system, comprising:
A method for fabricating memory devices, comprising:
Dependencies are inferred from the claim text.