Test apparatus and test method thereof

A test method, comprising:

• disposing a sample on an upper surface of a sample stage;
• performing a pre-profiling on a surface of the sample using a first tip coupled to a cantilever;
• selecting a second tip having a shape different from a shape of the first tip based on a result of the pre-profiling, and determining optimal conditions for performing a milling;
• performing the milling on the sample using the second tip;
• selecting a third tip having a shape different from shapes of the first tip and the second tip based on a result of the milling;
• performing a profiling on the sample using the third tip;
• repeatedly performing the milling and the profiling until the sample supported on the sample stage reaches a predetermined depth;
• and
• obtaining a structural information from the surface of the sample at the predetermined depth.

A test method, comprising:

• disposing a sample on an upper surface of a sample stage;
• performing a pre-profiling on a surface of the sample using a first tip of a first test unit of a plurality of test units, the first tip being coupled to a first cantilever within the first test unit of the plurality of test units;
• selecting a second test unit of the plurality of test units based on a result of the pre-profiling;
• selecting a second tip in the second test unit, the second tip having a shape different from a shape of the first tip, and determining optimal conditions for performing a milling;
• performing the milling on the sample using the second tip coupled to a second cantilever of the second test unit;
• selecting a third test unit of the plurality of test units based on a result of the milling;
• selecting a third tip in the third test unit, the third tip having a shape different from shapes of the first tip and the second tip;
• performing a profiling on the sample using the third tip coupled to a third cantilever of the third test unit;
• repeatedly performing the milling and the profiling until the sample supported on the sample stage reaches a predetermined depth;
• and
• obtaining a structural information from the surface of the sample at the predetermined depth.