Sensors for measuring pressure and temperature
AssigneeSimmonds Precision Products, Inc.
InventorsKristen Brosnan, Peter J. Carini
Life of this patent
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Abstract
A Fabry-Pérot sensor assembly includes an optical element defining a Fabry-Pérot optical cavity therein. A ferrule is affixed to the optical element. The ferrule is configured to physically connect to an optic fiber, aligning the optic fiber optically with the cavity. The optical element includes a MgAl2O4 spinel or aluminum oxynitride Al23N27O5. A method of making an Fabry-Pérot optical cavity includes using a ceramic processing etching process to remove material from a first optical member to form the cavity therein, leaving a rim of the optical member surrounding the cavity peripherally. The method includes affixing a second optical member to the rim to enclose the cavity.
Claims19
A Fabry-Pérot sensor assembly comprising:
- an optical element defining a Fabry-Pérot optical cavity therein;
- and
- a sensor ferrule affixed to the optical element, wherein the sensor ferrule is configured to physically connect to an optical fiber, optically aligning and spacing the optical fiber with the optical cavity, wherein the optical element includes MgAl2O4 spinel or aluminum oxynitride Al23N27O5.
A method of making a Fabry-Pérot optical cavity comprising:
- using a ceramic etching process to remove material from a first optical member to form the optical cavity therein, leaving a cavity rim of the optical member surrounding the cavity peripherally;
- and
- affixing a third optical member to the cavity rim to enclose the cavity.
Dependencies are inferred from the claim text.