Gradient glass-like ceramic structures and bottom-up fabrication method thereof
AssigneeGelest, Inc.
InventorsBarry C. ARKLES, Kerry Campbell DEMELLA, Jonathan D. GOFF
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Abstract
Thin glass-like ceramic films which possess organic or physically functional structures with thicknesses in the 15 to 500 nm range and bottom-up methods for their fabrication are described. SiO2-rich structures having gradient properties are formed from a silsesquioxane having an electronegative β substituent and at least one organofunctional silane or at least one metal alkoxide.
Claims27
A SiO2-rich structure having gradient properties, wherein the structure is formed from a silsesquioxane having an electronegative β substituent and at least one organofunctional silane.
A SiO2-rich structure having a gradient concentration of at least one metal oxide selected from the group consisting of oxides of germanium, tantalum, titanium, zirconium and hafnium, wherein the structure is formed from a metal alkoxide having the same metal as the at least one metal oxide and a silsesquioxane having an electronegative β substituent, wherein a plurality of silicon atoms are each bonded to four oxygen atoms and no more than about 50% of the silicon atoms are bonded to carbon atoms.
A method for forming a SiO2-rich structure having a gradient property, the method comprising preparing a coating composition comprising a silsesquioxane having an electronegative β substituent, at least one organofunctional silane, and optionally a solvent, coating the mixture onto a substrate, and heating and/or UV irradiating the coated substrate.
A method for forming a SiO2-rich structure having a gradient property, the method comprising preparing a coating composition comprising a silsesquioxane having an electronegative β substituent, at least one metal alkoxide, and optionally a solvent, coating the mixture onto a substrate, and heating and/or UV irradiating the coated substrate.
Dependencies are inferred from the claim text.