Compliance unit
AssigneeSMC Corporation
InventorMotohiro SATO
Life of this patent
Estimating the term…
Abstract
A compliance unit includes: a base plate extending along an XY plane; a table unit disposed movably with respect to the base plate along the XY plane; a compliance mechanism interposed between the base plate and the table unit so as to be movable in an X direction and a Y direction with respect to the base plate and the table unit; and an original position return mechanism configured to return the table unit and the compliance mechanism to an original position with respect to the base plate by pressing the table unit and the compliance mechanism from the outside toward the inside of the base plate.
Claims10
A compliance unit comprising:
- a base plate extending along an XY plane;
- a table unit disposed movably with respect to the base plate along the XY plane;
- a compliance mechanism interposed between the base plate and the table unit so as to be movable in an X direction and a Y direction with respect to the base plate and the table unit;
- and
- an original position return mechanism configured to return the table unit and the compliance mechanism to an original position with respect to the base plate by pressing the table unit and the compliance mechanism from an outside toward an inside in a planar direction of the base plate.
Dependencies are inferred from the claim text.