Two-Dimensional Resonant Rod-Based Delay Line With High Bandwidth
AssigneeNortheastern University
InventorsCristian CASSELLA, Onurcan KAYA, Xuanyi ZHAO
Life of this patent
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Abstract
An on-chip acoustic delay line (ADL) for operation in the radio frequency (RF) range uses a two-dimensional array of resonant rods and a piezoelectric layer having corrugated structure. The ADL has one or more programmable passband frequencies which are determined by the lithographically-defined artificial dispersive characteristics of acoustic metamaterials formed by forests of the locally resonant rods and selectable attached matching networks. The ADL devices offer exceptionally high fractional bandwidth and low insertion loss. The ADL can be used in self-interference cancellation networks to provide full duplex radio.
Claims29
An on-chip acoustic delay line device comprising:
- a conductive substrate suspended over a cavity in the chip, wherein the conductive substrate is anchored to the chip outside the cavity by two anchor structures at opposite sides of the conductive substrate;
- a piezoelectric layer comprising a sheet disposed on the conductive substrate and a parallel array of resonant rods disposed on the sheet, wherein the sheet comprises a piezoelectric material and the rods comprise a dielectric, metallic, or piezoelectric material;
- wideband input and output terminals disposed on the piezoelectric sheet lateral to and at opposite ends of the parallel array, along a long axis of the resonant rods.
A method of fabricating an on-chip acoustic delay line device, the method comprising the steps of:
- (a) depositing a conductive layer onto a chip substrate;
- (b) depositing a piezoelectric layer onto the conductive layer;
- (c) depositing a release pit mask onto the piezoelectric layer;
- (d) etching voids into the piezoelectric and conductive layers;
- (e) depositing a resonant rod array mask onto the piezoelectric layer;
- (f) etching troughs into the piezoelectric layer, thereby forming a corrugated structure comprising an array of parallel resonant rods in the piezoelectric layer;
- (g) depositing wideband input and output terminals at opposite ends of the array, along an axis transverse to a length direction of the resonant rods;
- and
- (h) etching a release pit beneath the conductive layer, thereby forming the acoustic delay line device.
A method of fabricating an on-chip acoustic delay line device, the method comprising the steps of:
- (a) depositing a conductive layer onto a chip substrate;
- (b) depositing a piezoelectric layer onto the conductive layer;
- (c) depositing a release pit mask onto the piezoelectric layer;
- (d) etching voids into the piezoelectric and conductive layers;
- (e) depositing a resonant rod array mask onto the piezoelectric layer;
- (f) depositing resonant rods onto the piezoelectric layer;
- (g) depositing wideband input and output terminals at opposite ends of the array, along an axis transverse to a length direction of the resonant rods;
- and
- (h) etching a release pit beneath the conductive layer, thereby forming the acoustic delay line device.
Dependencies are inferred from the claim text.