Dynamic freeform optics for lithography illumination beam shaping
OwnerMahsa Farsadinventor
Life of this patent
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Abstract
The system includes a light source configured to emit light and a pair of optical elements disposed in the path of the light and are reflective or refractive. The pair of optical elements are spaced apart in parallel planes and have cooperating non-planar surfaces that are configured to produce a first beam shape of the light emitted by the light source, which is directed onto a sample. The pair of optical elements are configured to move in the parallel planes to a position in which the cooperating non-planar surfaces are configured to produce a second beam shape of the light emitted by the light source that is a different shape from the first beam shape and directed onto the sample.
Claims20
A system comprising:
- a light source configured to emit light, wherein the light emitted by the light source is deep ultraviolet (DUV) light or extreme ultraviolet (EUV) light;
- an imaging mirror disposed in a light path of the light emitted by the light source, wherein the imaging mirror is configured to reflect the light emitted by the light source onto a sample;
- and
- a pair of reflective optical elements disposed in the light path between the light source and the imaging mirror, wherein the pair of reflective optical elements are spaced apart in parallel planes and have cooperating non-planar surfaces, and the light emitted by the light source is reflected between the cooperating non-planar surfaces to produce a first beam shape of the light to be reflected on the sample by the imaging mirror;
- wherein at least one of the pair of reflective optical elements is movable within one of the parallel planes to a position in which the light emitted by the light source reflected between the cooperating non-planar surfaces produces a second beam shape that is a different shape from the first beam shape.
A system comprising:
- a light source configured to emit light, wherein the light emitted by the light source is deep ultraviolet (DUV) light or extreme ultraviolet (EUV) light;
- an imaging mirror disposed in a light path of the light emitted by the light source, wherein the imaging mirror is configured to reflect the light emitted by the light source onto a sample;
- and
- a pair of refractive optical elements disposed in the light path between the light source and the imaging mirror, wherein the pair of refractive optical elements are spaced apart in parallel planes and have cooperating non-planar surfaces, and the light emitted by the light source is refracted through the cooperating non-planar surfaces to produce a first beam shape of the light to be reflected on the sample by the imaging mirror;
- wherein at least one of the pair of refractive optical elements is movable within one of the parallel planes to a position in which the light emitted by the light source refracted through the cooperating non-planar surfaces produces a second beam shape that is a different shape from the first beam shape.
A method comprising:
- emitting light from a light source, wherein the light emitted by the light source is deep ultraviolet (DUV) light or extreme ultraviolet (EUV) light;
- transmitting the light through a pair of optical elements, wherein the pair of optical elements are spaced apart in parallel planes and have cooperating non-planar surfaces that are configured to produce a first beam shape of the light emitted by the light source;
- directing the light in the first beam shape onto a sample;
- moving the pair of optical elements in the parallel planes to a position in which the cooperating non-planar surfaces are configured to produce a second beam shape of the light emitted by the light source that is a different shape from the first beam shape;
- and
- directing the light in the second beam shape onto the sample.
Dependencies are inferred from the claim text.