Liquid ejection head and method of producing the same
AssigneeCanon Kabushiki Kaisha
InventorsHARUKA YAMAJI, SOUTA TAKEUCHI, SATOSHI KIMURA, TAMAKI SATO
Life of this patent
Estimating the term…
Abstract
Included are: a substrate configured to form a channel for a liquid to be ejected; an ejection port formation member configured to form an ejection port, the liquid having passed through the channel being ejected via the ejection port; a cover member configured to bond to the ejection port formation member at an opposite side to the substrate via an adhesive; and a thin film formed on a face of the cover member, the face being on a side where the cover member is bonded to the ejection port formation member, the thin film containing silicon carbide, or any of carbon-containing silicon oxide, silicon nitride, and silicon oxynitride.
Claims14
A liquid ejection head comprising:
- a substrate configured to form a channel for a liquid to be ejected;
- an ejection port formation member configured to form an ejection port, the liquid having passed through the channel being ejected via the ejection port;
- a cover member configured to bond to the ejection port formation member at an opposite side to the substrate via an adhesive;
- and
- a thin film formed on a face of the cover member, the face being on a side where the cover member is bonded to the ejection port formation member, the thin film containing silicon carbide, or any of carbon-containing silicon oxide, silicon nitride, and silicon oxynitride.
A method of producing a liquid ejection head,
- wherein the liquid ejection head includes:
- a substrate configured to form a channel for a liquid to be ejected;
- an ejection port formation member configured to form an ejection port, the liquid having passed through the channel being ejected via the ejection port;
- and
- a cover member configured to bond to the ejection port formation member at an opposite side to the substrate via an adhesive to protect the ejection port,
- wherein the method of producing the liquid ejection head comprises:
- forming a thin film on a face of the cover member, the face being on a side where the cover member is bonded to the ejection port formation member, the thin film containing silicon carbide, or any of carbon-containing silicon oxide, silicon nitride, and silicon oxynitride.
Dependencies are inferred from the claim text.