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US 2024/0367971 A1Published application
Portable fluorine generator for on-site calibration
AssigneeApplied Materials, Inc.
InventorJoseph VAN GOMPEL
Life of this patent
Estimating the term…
Abstract
A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further includes a plasma reactor unit disposed within the housing and operable to separate fluorine from the feed gas comprising fluorine.
Claims20
A method for generating fluorine gas (F2), comprising:
- providing a feed gas comprising fluorine into a fluorine generator module, wherein the fluorine generator module comprises a dilution system and a plasma reactor unit;
- dissociating the feed gas comprising fluorine into reaction products using a plasma formed by the plasma reactor unit, wherein the reaction products comprise fluorine gas (F2);
- mixing the feed gas comprising fluorine or the fluorine gas (F2) with nitrogen gas in the dilution system;
- and
- calibrating analytical equipment with the fluorine gas.
2 more elements
A method for generating fluorine gas (F2), comprising:
- coupling a fluorine generator module to a sampling system downstream of a processing chamber, the fluorine generator module comprising a dilution system and a plasma reactor unit;
- mixing a feed gas and an inert gas in the dilution system, the feed gas comprising fluorine;
- providing the feed gas and the inert gas from the dilution system to the plasma reactor unit;
- dissociating the feed gas into reaction products using a plasma formed by the plasma reactor unit, the reaction products comprising fluorine gas (F2);
- and
- calibrating the sampling system with the fluorine gas (F2).
3 more elements
A method for generating fluorine gas (F2), comprising:
- coupling a fluorine generator module to a sampling system of a processing chamber for integrated circuit manufacturing, the fluorine generator module comprising a dilution system and a plasma reactor unit,
- providing a feed gas to the plasma reactor unit, the feed gas comprising fluorine;
- dissociating the feed gas into reaction products using a plasma formed by the plasma reactor unit, wherein the reaction products comprise fluorine gas (F2);
- mixing the reaction products and an inert gas in the dilution system;
- flowing the reaction products mixed with the inert gas from the dilution system into sampling system;
- and
- calibrating the sampling system with the reaction products.
4 more elements
Dependencies are inferred from the claim text.