Feedstock supply device
AssigneeTokyo Electronic Limited
InventorEiichi KOMORI
Life of this patent
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Abstract
A feedstock supply device according to one aspect of the present disclosure produces a reactive gas from a solution in which a solid feedstock has been dissolved in a solvent or from a dispersion system in which a solid feedstock has been dispersed into a dispersion medium. This feedstock supply device comprises: a container having a first wall surface forming an internal space; a spray nozzle for spraying the solution or the dispersion system into the internal space; and a wall structure provided to the internal space and having a second wall surface extending in the vertical direction.
Claims15
A raw material supply device for producing a reactive gas from a solution in which a solid raw material is dissolved in a solvent or from a dispersion system in which a solid raw material is dispersed in a dispersion medium, comprising:
- a container having a first wall surface forming an inner space;
- a spray nozzle configured to spray the solution or the dispersion system into the inner space;
- and
- a wall structure disposed in the inner space and having a second wall surface extending in a vertical direction.
A raw material supply device for producing a reactive gas from a solution of a solid raw material dissolved in a solvent or from a dispersion system in which a solid raw material is dispersed in a dispersion medium, comprising:
- a container having a first wall surface forming an inner space;
- a spraying nozzle configured to spray the solution or the dispersion system into the inner space;
- and
- a wall structure disposed in the inner space and having a second wall surface extending in a vertical direction.
Dependencies are inferred from the claim text.