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US 2024/0364076 A1Published application
Laser system and electronic device manufacturing method
AssigneeGigaphoton Inc.
InventorsChen QU, Taisuke MIURA
Life of this patent
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Abstract
A laser system includes a first semiconductor laser device configured to output first CW laser light, a first semiconductor optical amplification device configured to amplify the first CW laser light and output second CW laser light, an optical parametric amplification device configured to amplify the second CW laser light and output first pulse laser light, and a wavelength conversion device configured to perform wavelength conversion on the first pulse laser light and output second pulse laser light in a deep ultraviolet wavelength region.
Claims19
A laser system comprising:
- a first semiconductor laser device configured to output first CW laser light;
- a first semiconductor optical amplification device configured to amplify the first CW laser light and output second CW laser light;
- an optical parametric amplification device configured to amplify the second CW laser light and output first pulse laser light;
- and
- a wavelength conversion device configured to perform wavelength conversion on the first pulse laser light and output second pulse laser light in a deep ultraviolet wavelength region.
2 more elements
An electronic device manufacturing method, comprising:
- generating laser light using a laser system;
- outputting the laser light to an exposure apparatus;
- and
- exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
- the laser system including:
- a first semiconductor laser device configured to output first CW laser light;
- a first semiconductor optical amplification device configured to amplify the first CW laser light and output second CW laser light;
- an optical parametric amplification device configured to amplify the second CW laser light and output first pulse laser light;
- and
- a wavelength conversion device configured to perform wavelength conversion on the first pulse laser light and output second pulse laser light in a deep ultraviolet wavelength region.
7 more elements
Dependencies are inferred from the claim text.