Back to results
US 2024/0360914 A1Published application
Fluid control valve, fluid control device, and material supply system
AssigneeHORIBA STEC, Co., Ltd.
InventorsKazuo HANADA, Akihiro TAGUCHI, Kenta TAYAMA
Life of this patent
Estimating the term…
Abstract
A fluid control valve includes a casing, and a piezo actuator that is housed in the casing and held at one end side of the casing to extend toward another end side of the casing, where the casing has a vent hole.
Claims16
A fluid control valve comprising:
- a casing;
- and
- a piezo actuator that is housed in the casing and held at one end side of the casing to extend toward another end side of the casing, wherein the casing has a vent hole.
A fluid control valve comprising:
- a casing;
- and
- a piezo actuator including a piezoelectric element covered with an expandable covering member and housed in the casing, wherein the casing has a vent hole.
Dependencies are inferred from the claim text.