Substrate transfer robot and method of controlling the same
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorsMasaya YOSHIDA, Junichi SUGAHARA
Life of this patent
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Abstract
A substrate transfer robot includes a robot body including a first hand having a first substrate placing part on which a substrate is placed and a first substrate holding mechanism configured to hold and release the substrate, and a robot controller. The robot controller controls a speed of the first hand such that an absolute value of a first maximum speed or an absolute value of a first maximum acceleration during a first period after the first hand starts retreating until the substrate is held by the first substrate holding mechanism is lower than an absolute value of a second maximum speed or an absolute value of a second acceleration during a second period after the substrate is held until the first hand ends retreating.
Claims5
A substrate transfer robot comprising:
- a robot body including a first hand and a second hand, the first hand having a first substrate placing part on which a substrate is placed and the second hand having a second substrate placing part on which a substrate is placed, and the first hand and the second hand being capable of advancing and retreating;
- and
- a robot controller configured to control operations of the first hand and the second hand,
- wherein the robot controller performs a substrate exchange operation in which the first hand is operated so that the first hand is advanced while the substrate is not placed on the first substrate placing part to place the substrate placed on a substrate placement body on the first substrate placing part, and the first hand is then retreated, and the second hand is operated so that the second hand is advanced while the substrate is placed on the second substrate placing part to place the substrate placed on the second substrate placing part of the second hand on the substrate placement body, and the second hand is then retreated,
- wherein a part of the retreating operation of the first hand and at least a part of the advancing operation of the second hand are performed simultaneously,
- wherein a part of the retreating operation of the first hand and at least a part of the retreating operation of the second hand are performed simultaneously, and
- wherein a speed of the first hand is controlled such that an absolute value of a maximum speed of the first hand in a period in which a part of the retreating operation of the first hand and at least a part of the advancing operation of the second hand are performed simultaneously is lower than an absolute value of a maximum speed of the first hand in a period in which a part of the retreating operation of the first hand and at least a part of the retreating operation of the second hand are performed simultaneously.
Dependencies are inferred from the claim text.