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US 2024/0356519 A1Published application
Acoustic wave device with ceramic substrate
AssigneeSkyworks Solutions, Inc.
InventorsRei Goto, Hironori Fukuhara, Hiroyuki Nakamura, Keiichi Maki
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Abstract
A surface acoustic wave device is disclosed. The surface acoustic wave device can include a ceramic substrate, a piezoelectric layer over the ceramic substrate, and an interdigital transducer electrode over the piezoelectric layer. The ceramic substrate can be a polycrystalline spinel substrate. The surface acoustic wave device can also include a temperature compensating layer over the interdigital transducer electrode.
Claims20
A surface acoustic wave device comprising:
- a ceramic substrate having a scattering surface;
- a piezoelectric layer over the scattering surface of the ceramic substrate, the piezoelectric layer having a first area with a wavy or irregular pattern indicative of wave scattering at the scattering surface;
- and
- an interdigital transducer electrode disposed over a second area of the piezoelectric layer.
1 more element
A surface acoustic wave device comprising:
- a ceramic substrate having a scattering surface;
- a piezoelectric layer over the scattering surface of the ceramic substrate, the piezoelectric layer having at least a first area with a wavy or irregular pattern indicative of wave scattering at the scattering surface;
- and
- an interdigital transducer electrode disposed over a second area of the piezoelectric layer, the surface acoustic wave device configured to generate a surface acoustic wave having a wavelength λ, and the piezoelectric layer has a thickness in a range from 3λ to 20λ.
1 more element
A surface acoustic wave filter comprising:
- a surface acoustic wave resonator including a ceramic substrate having a scattering surface, a piezoelectric layer over the scattering surface of the ceramic substrate, the piezoelectric layer having at least a first area with a wavy or irregular pattern indicative of wave scattering at the scattering surface, an interdigital transducer electrode over a second area of the piezoelectric layer;
- and
- a plurality of additional acoustic wave resonators, the surface acoustic wave resonator and the plurality of additional acoustic wave resonators arranged to filter a radio frequency signal.
Dependencies are inferred from the claim text.