Work cleaning device and cleaning method
AssigneeNHK Spring Co., Ltd.
InventorEijiro FURUTA
Life of this patent
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Abstract
A cleaning device includes a support member supporting a suspension as a work, first piezoelectric elements arranged on the suspension, second piezoelectric elements arranged on the suspension, an oscillation signal generator and a blowing suction unit. The oscillation signal generator applies an oscillation signal to at least one of the piezoelectric elements and the second piezoelectric elements. A gas such as air is blown onto the suspension and a gas around the suspension is sucked by the blowing suction unit in a state where at least one of the piezoelectric elements is oscillated by the oscillation signal.
Claims8
A cleaning device for cleaning a work, the device comprising:
- piezoelectric elements mounted on the work;
- a conductive circuit portion provided on the work and conductive with the piezoelectric elements;
- a support member supporting the work;
- an oscillation signal generator outputting an oscillation signal to the piezoelectric elements through the conductive circuit portion;
- a power supply connecting unit electrically connecting the oscillation signal generator with the conductive circuit portion;
- and
- a gas ejection mechanism blowing a gas onto the work in a state where the piezoelectric elements are oscillated by the oscillation signal.
A cleaning method of cleaning a work in a gas, the method comprising steps of:
- attaching piezoelectric elements to the work;
- supporting the work to which the piezoelectric elements are attached;
- oscillating the piezoelectric elements and oscillating the work by applying an oscillation signal to the piezoelectric elements;
- and
- blowing a gas onto the work in a state where the work is oscillated.
Dependencies are inferred from the claim text.