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US 2024/0353353 A1Published application
Multi-layer high-aspect ratio x-ray grating and method of manufacture
OwnerKarim S. KARIM, Abdollah PIL-ALIinventors
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Abstract
The disclosure is directed at a multi-layer, high-aspect ratio X-ray grating apparatus and method of fabrication. In one embodiment, the disclosure may include a self-alignment methodology, or process, combined with a multiple layer structure fabrication. The grating may include a substrate with a seed layer on top. The grating further includes at least one patterned non-X-ray absorbing layer and at least one X-ray absorbing layer atop the seed layer.
Claims19
A method of fabricating a multi-layer X-ray grating comprising:
- applying a seed layer on a radiation transparent substrate;
- fabricating at least one patterned non-X-ray absorbing layer atop the seed layer, the at least one patterned non-X-ray absorbing layer including gaps;
- and
- fabricating at least one X-ray absorbing layer atop the seed layer into the gaps of the at least one non-X-ray absorbing layer.
1 more element
A multi-layer high-aspect ratio X-ray grating comprising:
- a substrate;
- a seed layer on top of the substrate;
- at least one patterned non-X-ray absorbing layer atop the seed layer, the at least one patterned non-X-ray absorbing layer including gaps;
- and
- at least one X-ray absorbing layer atop the seed layer, the at least one X-ray absorbing layer located within the gaps of the at least one patterned non-X-ray absorbing layer.
2 more elements
A phase contrast imaging system comprising:
- an X-ray source;
- an X-ray detector;
- and
- at least one multi-layer high-aspect ratio X-ray grating including:
- a substrate;
- a seed layer on top of the substrate;
- at least one patterned non-X-ray absorbing layer atop the seed layer, the at least one patterned non-X-ray absorbing layer including gaps;
- and
- at least one X-ray absorbing layer atop the seed layer, the at least one X-ray absorbing layer located within the gaps of the at least one patterned non-X-ray absorbing layer;
- wherein the X-ray grating is located between the X-ray source and the X-ray detector;
- and
- wherein an object of interest is located between the X-ray source and the X-ray detector.
9 more elements
Dependencies are inferred from the claim text.