Mass Spectrometer and Mass Spectrometry Method

A mass spectrometer according comprising:

• a threshold storage part that in which an abnormality determination threshold value is stored;
• a reaction chamber into which precursor ions are introduced;
• a radical generation chamber;
• a source gas supply part configured to supply source gas to the inside of the radical generation chamber;
• a radio-frequency power supply part configured to supply radio-frequency power for generating plasma inside the radical generation chamber;
• a plasma generation controller configured to supply the source gas and the radio-frequency power to the radical generation chamber for a predetermined period by transmitting a predetermined control signal to the source gas supply part and the radio-frequency power supply part to generate plasma inside the radical generation chamber;
• a photodetector configured to measure intensity of light having a wavelength band including a wavelength of light emitted from the plasma inside the radical generation chamber;
• a light intensity determination part configured to determine whether or not the intensity of light measured by the photodetector during a period other than the predetermined period exceeds the abnormality determination threshold value;
• and
• an abnormality notifier configured to notify an abnormality of the mass spectrometer when the light intensity determination part determines that the intensity of the light exceeds the abnormality determination threshold value.