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AssigneeFEI Company
InventorsPeter Christiaan Tiemeijer, Sorin Lazar, Bert Henning Freitag, Paolo Longo
Estimating the term…
Systems, devices, methods, and techniques for energy-loss spectroscopy at relatively large energy losses are described. A charged particle microscope system can include a beam column section. The beam column section can include one or more charged particle optical elements calibrated for a first energy and one or more charged particle optical elements calibrated for a second energy. The charged particle microscope system can include a detector section. The detector section can be disposed at a position downstream of the beam column section. The detector section can include an electrostatic or magnetic prism and one or more charged particle optical elements calibrated for the second energy. The first energy and the second energy can be different.
A charged particle microscope system, comprising:
One or more non-transitory machine-readable storage media storing instructions that, when executed by a machine, cause the machine to perform operations comprising:
Dependencies are inferred from the claim text.