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US 2024/0347311 A1Published application
System and apparatus for stabilizing electron sources in charged particle systems
AssigneeASML Netherlands B.V.
InventorsBruno LA FONTAINE, Juying DOU, Zhidong DU, Che-Chia KUO
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Abstract
Apparatuses and systems for stabilizing electron sources in charged particle beam inspection systems are provided. In some embodiments, a system may include an electron source comprising an emitting tip electrically connected to two electrodes and configured to emit an electron; and a base coupled to the emitting tip, wherein the base is configured to stabilize the emitting tip via the coupling.
Claims20
An electron beam system comprising:
- an electron source comprising:
- an emitting tip electrically connected to two electrodes and configured to emit an electron;
- and
- a base coupled to the emitting tip, wherein the base is configured to stabilize the emitting tip via the coupling.
1 more element
An electron source comprising:
- an emitting tip electrically connected to two electrodes and configured to emit an electron;
- and
- a base coupled to the emitting tip, wherein the base is configured to stabilize the emitting tip via the coupling.
Dependencies are inferred from the claim text.