Film forming apparatus for metal film
AssigneeToyota Jidosha Kabushiki Kaisha
InventorKazuaki OKAMOTO
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Abstract
The film forming apparatus is a device that forms a metal film on the surface of a base material. The film forming apparatus includes a container containing a plating solution, an electrolyte film that covers an opening of the container formed at a position facing the base material, and a positive electrode disposed above the electrolyte film in the container. It includes a power source that applies a voltage between the positive electrode and the base material. On the surface of the positive electrode, a surface facing the electrolyte film has a plurality of curved surfaces arranged in a convex manner toward the electrolyte film. A through hole passing through the positive electrode is formed between the plurality of curved surfaces.
Claims5
A film forming apparatus that forms a metal film on a surface of a base material, comprising:
- a container that contains a plating solution;
- an electrolyte film that covers an opening of the container formed at a position facing the base material;
- a positive electrode disposed above the electrolyte film in the container and being insoluble in the plating solution;
- and
- a power source that applies a voltage between the positive electrode and the base material, wherein:
- a plurality of curved surfaces convexly curved toward the electrolyte film is arranged on a facing surface that faces the electrolyte film, of a surface of the positive electrode;
- and
- a through hole that penetrates the positive electrode is formed between the curved surfaces.
Dependencies are inferred from the claim text.