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US 2024/0343591 A1Published application
Method of preparing iodosilanes and compositions therefrom
AssigneeEntegris, Inc.
InventorsScott A. Laneman, Thomas M. Cameron, Thomas H. Baum, David Kuiper, David M. Ermert, Johathan W. Dube
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Abstract
Provided are complexes useful in the conversion of chloro- and bromo-silanes to highly desired iodosilanes such as H2SiI2 and HSiI3, via a halide exchange reaction. The species which mediates this reaction is an iodide reactant comprising aluminum.
Claims6
1-20. (canceled)
An intermediate composition comprising:
- SiH2I2;
- SiH2Cl2;
- and SiH2(Cl)(I), in an aprotic solvent or neat.
An intermediate composition consisting of:
- SiH2I2;
- SiH2Cl2;
- SiH2(Cl)(I);
- and optionally an aprotic solvent.
1 more element
Dependencies are inferred from the claim text.