Reactive oxygen supply apparatus, treatment apparatus using reactive oxygen, and treatment method using reactive oxygen

A treatment device treating a surface of an object to be treated using active oxygen, the treatment device comprising:

• a humidifying device;
• a housing having at least one opening part;
• and
• a plasma actuator arranged inside of the housing, wherein
• the plasma actuator comprises a first electrode, a dielectric, and a second electrode laminated together in this order,
• the first electrode is an exposed electrode provided on a first surface representing one surface of the dielectric,
• when a voltage is applied between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge oriented from the first electrode toward the second electrode, and blows out an induced flow containing ozone in a first direction representing one direction along a surface of the dielectric from the first electrode,
• the humidifying device humidifies the induced flow containing the ozone to generate active oxygen in the induced flow, and the induced flow results in an induced flow containing the active oxygen, and
• the plasma actuator and the humidifying device are arranged so that the induced flow containing the active oxygen flows to an outside of the housing from the opening part.

A treatment method for treating a surface of an object to be treated using active oxygen, the treatment method comprising:

• a step of preparing a treatment device using active oxygen, wherein
• the treatment device using the active oxygen comprises
• a humidifying device,
• a housing having at least one opening part, and
• a plasma actuator arranged inside of the housing,
• the plasma actuator comprises a first electrode, a dielectric, and a second electrode laminated together in this order,
• the first electrode is an exposed electrode provided on a first surface representing one surface of the dielectric,
• when a voltage is applied between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge oriented from the first electrode toward the second electrode, and blows out an induced flow containing ozone in a first direction representing one direction along a surface of the dielectric from the first electrode,
• the humidifying device humidifies the induced flow containing the ozone to generate active oxygen in the induced flow, and the induced flow results in an induced flow containing the active oxygen, and
• the plasma actuator and the humidifying device are arranged so that the induced flow containing the active oxygen flows to an outside of the housing from the opening part,
• the treatment method further comprising
• a step of arranging the prepared treatment device using the active oxygen and the object to be treated at relative positions so that the surface of the object to be treated is exposed when the induced flow containing the active oxygen flows out from the opening part, and
• a step of causing the induced flow to flow out from the opening part to treat the surface of the object using the active oxygen.