Method of and apparatus for processing workpiece
AssigneeDisco Corporation
InventorKazuma SEKIYA
Life of this patent
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Abstract
A method of processing a workpiece to divide the workpiece into a plurality of device chips includes a dividing step of dividing a workpiece held on a holding table to produce a plurality of device chips from the workpiece, an image capturing step of capturing an image of the workpiece while the dividing step is being carried out or after the dividing step has been carried out, a detecting step of detecting from the image whether there is a chip fly-off from the workpiece or not and a chip fly-off region where a chip fly-off has occurred, and a warning step of warning of at least either one of a cause of the chip fly-off and a countermeasure against chip fly-offs.
Claims8
A method of processing a workpiece to divide the workpiece into a plurality of device chips, comprising:
- a dividing step of dividing a workpiece held on a holding table to produce a plurality of device chips from the workpiece;
- an image capturing step of capturing an image of the workpiece while the dividing step is being carried out or after the dividing step has been carried out;
- a detecting step of detecting from the image whether there is a chip fly-off from the workpiece or not and a chip fly-off region where a chip fly-off has occurred;
- and
- a warning step of warning of at least either one of a cause of the chip fly-off and a countermeasure against chip fly-offs according to a region where the chip fly-off has been detected.
An apparatus for processing a workpiece to divide the workpiece into a plurality of device chips, comprising:
- a holding table for holding a workpiece thereon;
- a dividing unit which divides the workpiece held on the holding table to produce a plurality of device chips from the workpiece;
- an image capturing unit which captures an image of the workpiece while the workpiece is being divided by the dividing unit or after the workpiece has been divided by the dividing unit;
- and
- a controller,
- wherein the controller includes
- a detecting section which detects a chip fly-off region where a chip fly-off has occurred by processing an image captured of the workpiece by the image capturing unit, and
- a warning section which warns of at least either one of a cause of the chip fly-off and a countermeasure against chip fly-offs according to the chip fly-off region detected by the detecting section.
Dependencies are inferred from the claim text.