Sintering press
AssigneeAmx—Automatrix S.R.L.
InventorNicola SCHIVALOCCHI
Life of this patent
Estimating the term…
Abstract
A press for pre-sintering or sintering silicon wafers that has a lower block and an upper block is provided. The lower block has a lower base and a lower plate. The lower plate rests exclusively on a top surface of a body of at least three compression load cells. The load cell bodies are supported by the lower base so that the top surfaces are substantially coplanar with each other.
Claims11
1-10. (canceled)
A press for pre-sintering or sintering silicon wafers, comprising a lower block and an upper block, wherein the lower block comprises a lower base and a lower plate supported by the lower base and forming a lower surface for supporting the silicon wafers to be sintered, and wherein the upper block comprises an upper plate forming an upper surface facing the lower surface, the press comprising actuator means suitable to translate the lower plate and/or the upper plate between an inactive position of mutual separation and an active position in which the upper surface applies a predetermined pressure to the silicon wafers present on the lower surface,
- wherein the lower plate rests only on a top surface of a body of at least three compression load cells, wherein the body of the at least three compression load cells is the only supporting element of the lower plate, the load cell bodies being supported by the lower base so that the top surfaces are substantially coplanar with one another.
Dependencies are inferred from the claim text.