Systems and methods of clamp compensation

A system for electron microscopy, comprising:

• a scanning transmission electron microscope (STEM);
• and
• a positioning system comprising
• a control unit comprising a shear signal generator configured to generate a modified shear element drive signal, the modified shear element drive signal comprising an initial shear element drive signal and a compensation signal,
• a drive unit comprising a clamp element and one or more shear elements, and
• a mover element coupled to a carrier for holding a workpiece, the mover element being engaged with the drive unit and being movable relative to the drive unit;
• wherein the control unit further comprises a clamp signal generator configured to generate a clamp element drive signal;
• and
• wherein the positioning system is situated to selectively position a workpiece for imaging with the STEM.