Inlet assembly
OwnerAndrew James Seeley, Michael Jay Silbersteininventors
Life of this patent
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Abstract
An inlet assembly includes an inlet nozzle configured to deliver an effluent stream into a combustion chamber of an abatement apparatus; and a reagent nozzle configured to deliver a reagent into the combustion chamber of the abatement apparatus, the reagent nozzle being located concentrically with respect to the inlet nozzle, the reagent nozzle being configured to deliver the reagent in different quantities at different positions around its perimeter.
Claims15
An inlet assembly for an abatement apparatus for treating an effluent stream from a semiconductor processing tool, said inlet assembly comprising:
- an inlet nozzle configured to deliver said effluent stream into a combustion chamber of said abatement apparatus;
- and
- a reagent nozzle configured to deliver a reagent into said combustion chamber of said abatement apparatus, said reagent nozzle being located concentrically with respect to said inlet nozzle, said reagent nozzle being configured to deliver said reagent in different quantities at different positions around its perimeter.
The inlet assembly of claim 16, wherein said clearance distance is at least one of:
- greater at positions which require more of said reagent to be delivered than at positions which require less of said reagent to be delivered;
- and
- greater within a vicinity of a circular portion of said annular obround than within a linear portion of said annular obround.
A method, comprising:
- delivering an effluent stream into a combustion chamber of an abatement apparatus with an inlet nozzle;
- locating a reagent nozzle concentrically with respect to said inlet nozzle;
- configuring said reagent nozzle configured to deliver a reagent in different quantities at different positions around its perimeter.
Dependencies are inferred from the claim text.