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US 2024/0328478 A1Published application
Vibration isolation systems with reaction masses and actuators
AssigneeNikon Corporation
InventorsAlton Hugh Phillips, Michael Birk Binnard, Yoon Jung Jeong, Matthew Parker-McCormick Bjork
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Abstract
An apparatus includes a processing unit, a reaction mass, and a rotary actuator that is coupled to the reaction mass. The rotary actuator is configured to couple to the processing unit and to move the reaction mass in response to a movement error of the processing unit to reduce the movement error of the processing unit. The apparatus can be used with robotic systems to reduce movement errors.
Claims26
An apparatus, comprising:
- a processing unit;
- a reaction mass;
- and
- a rotary actuator that is coupled to the reaction mass;
- wherein the rotary actuator is configured to couple to the processing unit and to move the reaction mass in response to a movement error of the processing unit to reduce the movement error of the processing unit.
2 more elements
A method, comprising:
- providing a rotary actuator coupled to a reaction mass;
- using the rotary actuator to couple to a processing unit;
- and
- in response to a movement error of the processing unit, moving the reaction mass with the rotary actuator coupled to the processing unit to reduce the movement error of the processing unit.
1 more element
A processing system, comprising:
- a processing unit;
- and
- an apparatus comprising a reaction mass and a rotary actuator configured to generate a force,
- wherein the reaction mass is movable at least in part by the force generated by the rotary actuator to reduce a positioning error of the processing unit, and
- wherein the rotary actuator is coupled to the processing unit.
2 more elements
Dependencies are inferred from the claim text.