US 2024/0327646 A1Published application

Method for producing silicon-containing oxide-coated aluminum nitride particle

AssigneeResonac Corporation

InventorsIkue KOBAYASHI, Naoki MINORIKAWA, Hiroki SUGIMOTO

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Abstract

A method for producing a silicon-containing oxide-coated aluminum nitride particle that maintains the high thermal conductivity of aluminum nitride particles, have excellent moisture resistance, and do not easily aggregate. A method for producing a silicon-containing oxide-coated aluminum nitride particle including an aluminum nitride particle and a silicon-containing oxide film that covers a surface of the aluminum nitride particle. The method includes a vapor-depositing an organic silicone compound including a specific structure on the surface of the aluminum nitride particle to obtain the aluminum nitride particle covered with the organic silicone compound under a nitrogen atmosphere, and a partial pressure of the organic silicone compound in the nitrogen atmosphere is 2.6×102 to 3.9×103 Pa, and heating the aluminum nitride particle covered with the organic silicone compound at a temperature of 300° C. or higher and lower than 1000° C.

Claims5

Dependent claims

A method for producing a silicon-containing oxide-coated aluminum nitride particle comprising an aluminum nitride particle and a silicon-containing oxide film that covers a surface of the aluminum nitride particle, the method comprising:

a first step of vapor-depositing an organic silicone compound comprising a compound represented by the following formula (3) on the surface of the aluminum nitride particle to obtain the aluminum nitride particle covered with the organic silicone compound;
and
a second step of heating the aluminum nitride particle covered with the organic silicone compound at a temperature of 300° C. or higher and lower than 1000° C.,
wherein the first step is performed under a nitrogen atmosphere, and a partial pressure of the organic silicone compound in the nitrogen atmosphere is 2.6×102 to 3.9×103 Pa, and
wherein a change rate of a particle size distribution width (P2) of the silicon-containing oxide-coated aluminum nitride particle with respect to a particle size distribution width (P1) of the aluminum nitride particle that is calculated by the following formula (I) is 10% r less,
wherein, in the formula (#), n is an integer of 3 to 6;
[
Math
.
1
]
Change
⁢
rate
⁢
(
%
)
⁢
of
⁢
particle
⁢
size
⁢
distribution
⁢
width
(
%
)
=
(
P
2
P
1
-
1
)
×
100
⁢
Particle
⁢
size
⁢
distribution
⁢
width
⁢
(
P
1
)
⁢
(
P
1
)
=
D
⁢
90
-
D
⁢
10
D
⁢
50
⁢
Particle
⁢
size
⁢
distribution
⁢
width
⁢
(
P
2
)
⁢
(
P
2
)
=
D
⁢
90
-
D
⁢
10
D
⁢
50
(
I
)
wherein, in P1 and P2, D90 is a cumulative volume 90% particle diameter of the particle, D50 is a cumulative volume 50% particle diameter of the particle, and D10 is a cumulative volume 10% particle diameter of the particle.

101 more elements

Dependencies are inferred from the claim text.

Facts

Application: 18/291,038Filed 29 Jun 2023
Priority: JP 2022-20123916 Dec 2022
Published: 3 Oct 2024
Term ends: Not estimatedThe source records don’t support an estimate.

Classification14 codes

C01B 21/0728
With aluminium: after-treatment, e.g. grinding, purification
C09C 3/006
Treatment in general of inorganic materials, other than fibrous fillers, to enhance their pigmenting or filling properties: combinations of…
C01B 21/072
Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one…:…
C08K 9/06
Ingredients treated with organic substances: with silicon-containing compounds