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US 2024/0326002 A1Published application
A system for generating phosphine gas
OwnerRajnikant SHROFF, Pushpaksen P ASHERinventors
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Abstract
A system for generating phosphine gas by mixing a metal phosphide and water upon agitation and dilution with air, and a method of generating phosphine gas using said system.
Claims18
A system for generating phosphine gas, comprising:
- a. a reactor including a metal phosphide input;
- b. a water reservoir to receive water;
- c. an agitation air compressor to supply agitation air to the reactor via a tangential agitation air inlet port;
- d. an air blowing unit to provide dilution air;
- e. a heater;
- f. a control unit to control the operation of heater, agitation air compressor and/or air blowing unit;
- and
- g. a phosphine gas outlet port including a means to prevent the exit of metal phosphide particles from the reactor.
5 more elements
A method of generating phosphine gas using the system for generating phosphine gas, comprising the steps of:
- k. feeding a metal phosphide and water to the reactor;
- and
- l. mixing therein to form a reaction mixture to generate phosphine gas,
- wherein the metal phosphide is aluminum phosphide.
1 more element
Dependencies are inferred from the claim text.