Film forming apparatus

A film forming apparatus, comprising:

• a first vaporizer configured to vaporize a first monomer containing isocyanate;
• a second vaporizer configured to vaporize a second monomer that reacts with the first monomer to form a polymer;
• a first pipe connected to the first vaporizer;
• a second pipe connected to the second vaporizer;
• and
• a chamber having an internal space for accommodating a substrate, connected to the first pipe and the second pipe, and configured to form a polymer film on the substrate by vapor deposition polymerization using the first monomer supplied to the internal space via the first pipe and the second monomer supplied to the internal space via the second pipe,
• wherein the first vaporizer heats the first monomer to a temperature of 120 degrees C. or less,
• wherein a pressure inside the first vaporizer is equal to or higher than a pressure in the chamber, and
• wherein a differential pressure between the pressure inside the first vaporizer and the pressure in the chamber is 1 Torr or less.