Processing apparatus separating multilayer material, processing method, and method for manufacturing article using processing apparatus

Abstract

A processing apparatus configured to separate a multilayer material in which a curable composition is sandwiched between a first member and a second member facing each other, includes a first holding unit configured to suction and hold a first surface of the multilayer material, a second holding unit configured to suction and hold a second surface facing the first surface of the multilayer material, and a deformation mechanism, wherein at least one of the first holding unit and the second holding unit is configured to suction and hold the multilayer material via a flexible member, and wherein the deformation mechanism is configured to deform at least a portion of the flexible member so as to form a start point of separation in the multilayer material.

Dependencies are inferred from the claim text.