Ceramic fibers for shielding in vacuum chamber systems and methods for using same

A method of assembling a vacuum chamber system, the vacuum chamber system comprising:

• a vacuum chamber defining a cavity, the vacuum chamber comprising:
• a set of chamber components, the set of chamber components defining a cavity and one or more gaps where each gap of the one or more gaps is defined between two or more chamber components of the set of chamber components;
• one or more gaskets, each gasket of the one or more gaskets being configured for placement in a corresponding gap of the one or more gaps to provide a seal for that gap;
• and
• one or more shield assemblies, each shield assembly of the one or more shield assemblies comprising a plurality of ceramic fibers configured for placement between a corresponding gasket of the one or more gaskets and the cavity;
• the method comprising, for each shield assembly of the one or more shield assemblies:
• removing organic materials disposed on the plurality of ceramic fibers;
• placing the corresponding gasket into the corresponding gap defined by the set of chamber components;
• placing the shield assembly between the corresponding gasket and the cavity of the vacuum chamber;
• and
• clamping together the set of chamber components to compress the corresponding gasket and seal the corresponding gap.

A vacuum chamber, comprising:

• a set of chamber components, the set of chamber components defining a cavity, a first chamber component and a second chamber component of the set of chamber components defining a gap therebetween;
• a gasket, disposed in the gap, to seal the gap defined by the first chamber component and the second chamber component;
• and
• a shield assembly, disposed between the gasket and the cavity, including a plurality of ceramic fibers,
• wherein the cavity is configured to be evacuated.

A vacuum chamber, comprising:

• a set of chamber components defining a cavity;
• and
• a shield assembly, disposed in the cavity, including a plurality of ceramic fibers,
• wherein the cavity is configured to be evacuated.

A method of cleaning a vacuum chamber system, the vacuum chamber system comprising:

• a vacuum chamber defining a cavity, the vacuum chamber comprising;
• a gasket formed of an elastomer;
• and
• a shield assembly having a plurality of ceramic fibers;
• a plasma source coupled to the vacuum chamber;
• and
• a pump coupled the vacuum chamber,
• the method comprising:
• injecting a plasma into the cavity of the vacuum chamber such that the plasma fills the cavity thereby locally heating interior surfaces of the vacuum chamber;
• while the interior surfaces of the vacuum chamber are heated, removing first contaminants released from the interior surfaces of the vacuum chamber using the pump,
• wherein the shield assembly suppresses generation of second contaminants from the gasket by reducing transport of charged particles from the plasma to the gasket.